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Study of the Influence of the Irradiation Flux Density on the Formation of a Defect Structure in AlN in the Case of the Effect of Overlapping of the Heavy Ion Motion Trajectories in the Near-Surface Layer

Study of the Influence of the Irradiation Flux Density on the Formation of a Defect Structure in AlN in the Case of the Effect of Overlapping of the Heavy Ion Motion Trajectories in the Near-Surface Layer

Bikhert, Yeugeniy V.; Kozlovskiy, Artem L.; Popov, Anatoli I.; Zdorovets, Maxim V.
URI: http://rep.enu.kz/handle/enu/21012
Date: 2023

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